Michael M. Ludwig

Entity
Individual
Business address
C/O Amtech Systems, Inc., 131 S Clark Drive, 85288 Tempe, AZ
Signature Ownership
/s/ Wade D. Jenke, by power of attorney
All SEC filings
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Michael M. Ludwig has filed 53 SEC EDGAR filings since 10/22/2003

Latest Filings

Form type Document Filing Description Filing date Reporting date File number(s)
4 Open Document Open Filing 4 Mar 7, 2025 Mar 5, 2025 000-11412
4 Open Document Open Filing 4 Mar 13, 2024 Mar 11, 2024 000-11412
4 Open Document Open Filing 4 Mar 8, 2024 Mar 6, 2024 000-11412
4 Open Document Open Filing 4 Mar 4, 2024 Mar 1, 2024 000-11412
4 Open Document Open Filing FORM 4 SUBMISSION Mar 3, 2023 Mar 1, 2023 000-11412
4 Open Document Open Filing FORM 4 SUBMISSION Jan 18, 2023 Jan 13, 2023 000-11412
3 Open Document Open Filing FORM 3 SUBMISSION Jan 18, 2023 Jan 13, 2023 000-11412
4 Open Document Open Filing PRIMARY DOCUMENT Feb 17, 2021 Feb 12, 2021 001-04347
4 Open Document Open Filing PRIMARY DOCUMENT Feb 9, 2021 Feb 7, 2021 001-04347
4 Open Document Open Filing PRIMARY DOCUMENT Sep 18, 2020 Sep 17, 2020 001-04347
4 Open Document Open Filing PRIMARY DOCUMENT Feb 14, 2020 Feb 12, 2020 001-04347
4 Open Document Open Filing PRIMARY DOCUMENT Feb 11, 2020 Feb 7, 2020 001-04347
4 Open Document Open Filing Sep 19, 2019 Sep 17, 2019 001-04347
4/A Open Document Open Filing Apr 3, 2019 Feb 7, 2019 001-04347
4 Open Document Open Filing Feb 11, 2019 Feb 7, 2019 001-04347
3/A Open Document Open Filing Oct 15, 2018 Sep 17, 2018 001-04347
4 Open Document Open Filing Sep 19, 2018 Sep 17, 2018 001-04347
3 Open Document Open Filing Sep 19, 2018 Sep 17, 2018 001-04347
4 Open Document Open Filing FORM 4 Feb 22, 2018 Feb 20, 2018 000-50307
4 Open Document Open Filing FORM 4 Feb 16, 2018 Feb 15, 2018 000-50307
4/A Open Document Open Filing FORM 4/A Feb 12, 2018 May 5, 2015 000-50307
4 Open Document Open Filing FORM 4 Feb 12, 2018 Sep 18, 2015 000-50307
4 Open Document Open Filing FORM 4 Nov 14, 2017 Nov 13, 2017 000-50307
4 Open Document Open Filing FORM 4 Aug 24, 2017 Aug 23, 2017 000-50307
4 Open Document Open Filing FORM 4 Aug 22, 2017 Aug 19, 2017 000-50307
4 Open Document Open Filing FORM 4 Jul 21, 2017 Jul 20, 2017 000-50307
4 Open Document Open Filing FORM 4 May 31, 2017 May 28, 2017 000-50307
4 Open Document Open Filing FORM 4 May 9, 2017 May 5, 2017 000-50307
4 Open Document Open Filing FORM 4 May 3, 2017 May 1, 2017 000-50307
4 Open Document Open Filing FORM 4 Aug 22, 2016 Aug 19, 2016 000-50307
4 Open Document Open Filing FORM 4 Jun 2, 2016 May 31, 2016 000-50307
4 Open Document Open Filing FORM 4 May 9, 2016 May 5, 2016 000-50307
4 Open Document Open Filing FORM 4 May 3, 2016 May 2, 2016 000-50307
4 Open Document Open Filing FORM 4 Apr 8, 2016 Apr 6, 2016 000-50307
4 Open Document Open Filing PRIMARY DOCUMENT Jun 1, 2015 May 28, 2015 000-50307
4 Open Document Open Filing PRIMARY DOCUMENT May 8, 2015 May 6, 2015 000-50307
4 Open Document Open Filing PRIMARY DOCUMENT May 7, 2015 May 5, 2015 000-50307
4 Open Document Open Filing PRIMARY DOCUMENT May 6, 2015 Apr 8, 2015 000-50307
4 Open Document Open Filing PRIMARY DOCUMENT Mar 3, 2015 Feb 27, 2015 000-50307
4 Open Document Open Filing PRIMARY DOCUMENT Feb 12, 2015 Feb 10, 2015 000-50307
4 Open Document Open Filing PRIMARY DOCUMENT May 8, 2014 May 6, 2014 000-50307
4 Open Document Open Filing PRIMARY DOCUMENT May 7, 2014 May 5, 2014 000-50307
4 Open Document Open Filing PRIMARY DOCUMENT Feb 28, 2014 Feb 27, 2014 000-50307
4 Open Document Open Filing PRIMARY DOCUMENT Feb 12, 2014 Feb 10, 2014 000-50307
4 Open Document Open Filing PRIMARY DOCUMENT Jan 30, 2014 Jan 28, 2014 000-50307