| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| Quirk Jeanne | Director | C/O AXCELIS TECHNOLOGIES, INC., 108 CHERRY HILL DRIVE, BEVERLY | /s/ Eileen J. Evans, Attorney-in-Fact | 15 May 2025 | 0001908822 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ACLS | Common Stock | Award | $0 | +3.59K | +43.93% | $0.00 | 11.7K | 15 May 2025 | Direct | F1, F2 |
| Id | Content |
|---|---|
| F1 | These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2026. |
| F2 | Of the shares held as of May 15, 2025, 4,158 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture. |