| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| Richards Neil | SVP, KSP Program Lead | C/O ENTEGRIS, INC., 129 CONCORD ROAD, BILLERICA | /s/ Joseph Colella, Attorney-In-Fact for Neil Richards | 27 Aug 2025 | 0001932852 |
Neil Richards is no longer subject to Section 16 filing requirements. Form 4 or Form 5 obligations may continue.