Shirley Chen - 02 Sep 2025 Form 4 Insider Report for ONTO INNOVATION INC. (ONTO)

Role: SVP, Customer Success
Signature: By: Eric French For: Shirley Chen
Issuer symbol: ONTO
Transactions as of: 02 Sep 2025
Transactions value $: $0
Form type: 4
Filing time: 03 Sep 2025, 16:08:30 UTC
Previous filing: 30 Jun 2025
SEC: View on sec.gov

Reporting Owners (1)

Name	Relationship	Address	Signature	Signature date	CIK
Chen Shirley	SVP, Customer Success	C/O ONTO INNOVATION INC., 16 JONSPIN ROAD, WILMINGTON	By: Eric French For: Shirley Chen	03 Sep 2025	0002074793

Transactions Table

Type	Sym	Class	Transaction	Value $	Shares	Change %	* Price $	Shares After	Date	Ownership	Footnotes
transaction	ONTO	Common Stock	Award	$0	+12,994		$0.000000	12,994	02 Sep 2025	Direct	F1

* An asterisk sign (*) next to the price indicates that the price is likely invalid.

Explanation of Responses:

Id	Content
F1	The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.