Share-based Payment Arrangement, Expense of ONTO INNOVATION INC. from 01 Jan 2011 to 27 Sep 2025

Taxonomy & unit
us-gaap: USD
Description
Amount of expense for award under share-based payment arrangement. Excludes amount capitalized.
Summary
ONTO INNOVATION INC. quarterly and annual Share-based Payment Arrangement, Expense in USD history and change rate from 01 Jan 2011 to 27 Sep 2025.
  • ONTO INNOVATION INC. Share-based Payment Arrangement, Expense for the quarter ending 27 Sep 2025 was $6,887,000, a 2.9% decline year-over-year.
  • ONTO INNOVATION INC. Share-based Payment Arrangement, Expense for the twelve months ending 27 Sep 2025 was $27,131,000.
  • ONTO INNOVATION INC. annual Share-based Payment Arrangement, Expense for 2024 was $28,577,000, a 12% increase from 2023.
  • ONTO INNOVATION INC. annual Share-based Payment Arrangement, Expense for 2023 was $25,513,000, a 4.4% increase from 2022.
  • ONTO INNOVATION INC. annual Share-based Payment Arrangement, Expense for 2022 was $24,426,000, a 25% increase from 2021.
Source SEC data
View on sec.gov
Share-based Payment Arrangement, Expense, Trailing 12 Months (USD)
Share-based Payment Arrangement, Expense, Quarterly (USD)
Share-based Payment Arrangement, Expense, YoY Quarterly Change (%)
Share-based Payment Arrangement, Expense, Annual (USD)
Share-based Payment Arrangement, Expense, YoY Annual Change (%)

ONTO INNOVATION INC. Quarterly Share-based Payment Arrangement, Expense (USD)

Period TTM Value Value YoY Chg Change % Start Date End Date Report Filed Fiscal Year Fiscal Period
Q3 2025 $27,131,000 $6,887,000 -$208,000 -2.9% 29 Jun 2025 27 Sep 2025 10-Q 06 Nov 2025 2025 Q3
Q2 2025 $27,339,000 $6,678,000 -$1,566,000 -19% 30 Mar 2025 28 Jun 2025 10-Q 07 Aug 2025 2025 Q2
Q1 2025 $28,905,000 $6,814,000 +$328,000 +5.1% 29 Dec 2024 29 Mar 2025 10-Q 08 May 2025 2025 Q1
Q4 2024 $28,577,000 $6,752,000 29 Sep 2024 28 Dec 2024 10-K 25 Feb 2025 2024 FY
Q3 2024 $7,095,000 30 Jun 2024 28 Sep 2024 10-Q 06 Nov 2025 2025 Q3
Q2 2024 $8,244,000 31 Mar 2024 29 Jun 2024 10-Q 07 Aug 2025 2025 Q2
Q1 2024 $6,486,000 31 Dec 2023 30 Mar 2024 10-Q 08 May 2025 2025 Q1
Q4 2019 $17,662,000 $7,949,000 +$10,116,000 29 Sep 2019 31 Dec 2019 10-K 24 Feb 2023 2022 FY
Q3 2019 $7,546,000 $3,399,000 +$187,000 +5.8% 30 Jun 2019 28 Sep 2019 10-Q 07 Nov 2019 2019 Q3
Q2 2019 $7,359,000 $3,200,000 +$521,000 +19% 31 Mar 2019 29 Jun 2019 10-Q 31 Jul 2019 2019 Q2
Q1 2019 $6,838,000 $3,114,000 +$776,000 +33% 30 Dec 2018 30 Mar 2019 10-Q 01 May 2019 2019 Q1
Q4 2018 $6,062,000 $2,167,000 -$1,063,000 -96% 30 Sep 2018 31 Dec 2018 10-K 19 Feb 2021 2020 FY
Q3 2018 $7,125,000 $3,212,000 +$765,000 +31% 01 Jul 2018 29 Sep 2018 10-Q 07 Nov 2019 2019 Q3
Q2 2018 $6,360,000 $2,679,000 +$516,000 +24% 01 Apr 2018 30 Jun 2018 10-Q 31 Jul 2019 2019 Q2
Q1 2018 $5,844,000 $2,338,000 +$174,000 +8% 31 Dec 2017 31 Mar 2018 10-Q 01 May 2019 2019 Q1
Q4 2017 $5,670,000 $1,104,000 -$3,338,000 -149% 01 Oct 2017 31 Dec 2017 10-K 25 Feb 2020 2019 FY
Q3 2017 $9,008,000 $2,447,000 +$447,000 +22% 01 Jul 2017 30 Sep 2017 10-Q 31 Oct 2018 2018 Q3
Q2 2017 $8,561,000 $2,163,000 +$420,000 +24% 02 Apr 2017 01 Jul 2017 10-Q 02 Aug 2018 2018 Q2
Q1 2017 $8,141,000 $2,164,000 +$475,000 +28% 01 Jan 2017 01 Apr 2017 10-Q 03 May 2018 2018 Q1
Q4 2016 $7,666,000 $2,234,000 +$650,000 +41% 25 Sep 2016 31 Dec 2016 10-K 25 Feb 2019 2018 FY
Q3 2016 $7,016,000 $2,000,000 +$318,000 +19% 26 Jun 2016 24 Sep 2016 10-Q 03 Nov 2017 2017 Q3
Q2 2016 $6,698,000 $1,743,000 +$332,000 +24% 27 Mar 2016 25 Jun 2016 10-Q 03 Aug 2017 2017 Q2
Q1 2016 $6,366,000 $1,689,000 +$118,000 +7.5% 27 Dec 2015 26 Mar 2016 10-Q 29 Apr 2016 2016 Q1
Q4 2015 $6,248,000 $1,584,000 -$53,000 -3.2% 27 Sep 2015 26 Dec 2015 10-K 26 Feb 2018 2017 FY
Q3 2015 $6,301,000 $1,682,000 -$23,000 -1.3% 28 Jun 2015 26 Sep 2015 10-Q 30 Oct 2015 2015 Q3
Q2 2015 $6,324,000 $1,411,000 -$365,000 -21% 29 Mar 2015 27 Jun 2015 10-Q 28 Jul 2016 2016 Q2
Q1 2015 $6,689,000 $1,571,000 -$63,000 -3.9% 28 Dec 2014 28 Mar 2015 10-Q 29 Apr 2016 2016 Q1
Q4 2014 $6,752,000 $1,637,000 -$127,000 -7.2% 28 Sep 2014 27 Dec 2014 10-K 03 Mar 2017 2016 FY
Q3 2014 $6,879,000 $1,705,000 -$997,000 -37% 29 Jun 2014 27 Sep 2014 10-Q 30 Oct 2015 2015 Q3
Q2 2014 $7,876,000 $1,776,000 +$25,000 +1.4% 30 Mar 2014 28 Jun 2014 10-Q 24 Jul 2015 2015 Q2
Q1 2014 $7,851,000 $1,634,000 +$177,000 +12% 29 Dec 2013 29 Mar 2014 10-Q 29 Apr 2015 2015 Q1
Q4 2013 $7,674,000 $1,764,000 +$410,000 +30% 29 Sep 2013 28 Dec 2013 10-K 24 Feb 2016 2015 FY
Q3 2013 $7,264,000 $2,702,000 +$1,220,000 +82% 30 Jun 2013 28 Sep 2013 10-Q 31 Oct 2014 2014 Q3
Q2 2013 $6,044,000 $1,751,000 +$158,000 +9.9% 31 Mar 2013 29 Jun 2013 10-Q 01 Aug 2014 2014 Q2
Q1 2013 $5,886,000 $1,457,000 -$4,000 -0.27% 30 Dec 2012 30 Mar 2013 10-Q 06 May 2014 2014 Q1
Q4 2012 $5,890,000 $1,354,000 30 Sep 2012 29 Dec 2012 10-K 25 Feb 2015 2014 FY
Q3 2012 $1,482,000 +$512,000 +53% 01 Jul 2012 29 Sep 2012 10-Q 07 Nov 2013 2013 Q3
Q2 2012 $1,593,000 +$638,000 +67% 01 Apr 2012 30 Jun 2012 10-Q 02 Aug 2013 2013 Q2
Q1 2012 $1,461,000 01 Jan 2012 31 Mar 2012 10-Q 07 May 2013 2013 Q1
Q3 2011 $970,000 03 Jul 2011 01 Oct 2011 10-Q 07 Nov 2012 2012 Q3
Q2 2011 $955,000 03 Apr 2011 02 Jul 2011 10-Q 09 Aug 2012 2012 Q2

ONTO INNOVATION INC. Annual Share-based Payment Arrangement, Expense (USD)

Period Value YoY Chg Change % Start Date End Date Report Filed Fiscal Year Fiscal Period
2024 $28,577,000 +$3,064,000 +12% 31 Dec 2023 28 Dec 2024 10-K 25 Feb 2025 2024 FY
2023 $25,513,000 +$1,087,000 +4.4% 01 Jan 2023 30 Dec 2023 10-K 25 Feb 2025 2024 FY
2022 $24,426,000 +$4,884,000 +25% 02 Jan 2022 31 Dec 2022 10-K 25 Feb 2025 2024 FY
2021 $19,542,000 -$4,884,000 -20% 02 Jan 2021 01 Jan 2022 10-K 25 Feb 2022 2021 FY
2020 $24,426,000 +$6,764,000 +38% 01 Jan 2020 26 Dec 2020 10-K 24 Feb 2023 2022 FY
2019 $17,662,000 +$11,600,000 +191% 01 Jan 2019 31 Dec 2019 10-K 24 Feb 2023 2022 FY
2018 $6,062,000 +$392,000 +6.9% 01 Jan 2018 31 Dec 2018 10-K 19 Feb 2021 2020 FY
2017 $5,670,000 -$1,996,000 -26% 01 Jan 2017 31 Dec 2017 10-K 25 Feb 2020 2019 FY
2016 $7,666,000 +$1,418,000 +23% 27 Dec 2015 31 Dec 2016 10-K 25 Feb 2019 2018 FY
2015 $6,248,000 -$504,000 -7.5% 28 Dec 2014 26 Dec 2015 10-K 26 Feb 2018 2017 FY
2014 $6,752,000 -$922,000 -12% 29 Dec 2013 27 Dec 2014 10-K 03 Mar 2017 2016 FY
2013 $7,674,000 +$1,784,000 +30% 30 Dec 2012 28 Dec 2013 10-K 24 Feb 2016 2015 FY
2012 $5,890,000 +$1,417,000 +32% 01 Jan 2012 29 Dec 2012 10-K 25 Feb 2015 2014 FY
2011 $4,473,000 +$1,523,000 +52% 02 Jan 2011 31 Dec 2011 10-K 07 Mar 2014 2013 FY
2010 $2,950,000 03 Jan 2010 01 Jan 2011 10-K 12 Mar 2013 2012 FY
* An asterisk sign (*) next to the value indicates that the value is likely invalid.