| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| DAIGLE ROBERT C | Chairman & CEO, Director | C/O AMTECH SYSTEMS, INC., 58 S. RIVER DRIVE, SUITE 370, TEMPE | /s/ Robert C. Daigle, Chief Executive Officer | 16 May 2025 | 0001267540 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ASYS | Amtech Systems, Inc. $0.01 par value common stock | Purchase | $17.4K | +5K | +3.35% | $3.48 | 154K | 14 May 2025 | Direct | |
| transaction | ASYS | Amtech Systems, Inc. $0.01 par value common stotock | Purchase | $8.72K | +2.5K | +1.62% | $3.49 | 157K | 15 May 2025 | Direct | |
| transaction | ASYS | Amtech Systems, Inc. $0.01 par value common stock | Purchase | $1.24K | +355 | +0.23% | $3.48 | 157K | 16 May 2025 | Direct |