| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| DAIGLE ROBERT C | Chairman & CEO, Director | C/O AMTECH SYSTEMS, INC., 58 S. RIVER DRIVE, SUITE 370, TEMPE | /s/ Robert C. Daigle, Chief Executive Officer | 15 Aug 2025 | 0001267540 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Underlying Class | Amount | Exercise Price | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ASYS | Amtech Systems, Inc. Employee Stock Option | Award | +100K | 100K | 08 Aug 2025 | Amtech Systems, Inc. $0.01 par value common stock | 100K | $5.09 | Direct | F1 |
| Id | Content |
|---|---|
| F1 | Price omitted because the transaction is a grant of a stock option. |