| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| COOGAN JAMES GORDON | EVP AND CFO | C/O AXCELIS TECHNOLOGIES, INC., 108 CHERRY HILL DRIVE, BEVERLY | /s/ Eileen J. Evans, Attorney-in-Fact | 2025-05-16 | 0001797868 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ACLS | Common Stock | Award | $0 | +12.3K | +78.61% | $0.00 | 27.9K | May 15, 2025 | Direct | F1, F2 |
| transaction | ACLS | Common Stock | Award | $0 | +12.3K | +44.01% | $0.00 | 40.2K | May 15, 2025 | Direct | F3, F4 |
| transaction | ACLS | Common Stock | Tax liability | -$36K | -574 | -1.43% | $62.67 | 39.7K | May 15, 2025 | Direct | F5, F6, F7 |
| Id | Content |
|---|---|
| F1 | These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of May 15, 2026, May 15, 2027, May 15, 2028, and May 15, 2029. |
| F2 | Of the shares held following this grant on May 15, 2025, 25,022 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. |
| F3 | These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025. In this grant, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2025 performance goals. Assuming continuation of employment, 50% of the earned shares will vest on February 28, 2027, and 50% of the earned shares will vest on February 28, 2028. Unearned restricted stock units will forfeit on February 28, 2026. |
| F4 | Of the shares held after this grant on May 15, 2025, 37,317 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. |
| F5 | This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2025 of restricted stock units ("RSUs") granted to the executive in May 2024. As agreed with the executive, the shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested RSUs. |
| F6 | Represents the closing price of the common stock on the date of the tax withholding. |
| F7 | Of the shares held after this vesting event on May 15, 2025, 36,130 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. |