James Gordon Coogan - Oct 16, 2025 Form 4 Insider Report for AXCELIS TECHNOLOGIES INC (ACLS)

Signature
/s/ Eileen J. Evans, Attorney-in-Fact
Stock symbol
ACLS
Transactions as of
Oct 16, 2025
Transactions value $
-$59,621
Form type
4
Date filed
10/17/2025, 05:05 PM
Previous filing
May 19, 2025

Reporting Owners (1)

Name Relationship Address Signature Signature date CIK
COOGAN JAMES GORDON EVP AND CFO C/O AXCELIS TECHNOLOGIES, INC., 108 CHERRY HILL DRIVE, BEVERLY /s/ Eileen J. Evans, Attorney-in-Fact 2025-10-17 0001797868

Transactions Table

Type Sym Class Transaction Value $ Shares Change % * Price $ Shares After Date Ownership Footnotes
transaction ACLS Common Stock Tax liability -$59.6K -713 -1.8% $83.62 38.9K Oct 16, 2025 Direct F1, F2, F3
* An asterisk sign (*) next to the price indicates that the price is likely invalid.

Explanation of Responses:

Id Content
F1 This forfeiture of shares for tax withholding purposes relates to the vesting on October 16, 2025 of service vesting restricted stock units granted to the executive in October 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.
F2 Represents the closing price of the common stock on the date of the tax withholding.
F3 Of the shares held after this vesting event on October 16, 2025, 34,657 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.