| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| ROBERTS BRIAN K | Chief Financial Officer | C/O ONTO INNOVATION INC., 16 JONSPIN ROAD, WILMINGTON | By: Yoon Ah Oh For: Brian K. Roberts | 16 Jun 2025 | 0001259094 |
No securities are beneficially owned.
Exhibit List: Exhibit 24 - Power of Attorney