| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| ROBERTS BRIAN K | Chief Financial Officer | C/O ONTO INNOVATION INC., 16 JONSPIN ROAD, WILMINGTON | By: Eric French For: Brian K. Roberts | 2025-09-03 | 0001259094 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ONTO | Common Stock | Award | $0 | +21.2K | $0.00 | 21.2K | Sep 2, 2025 | Direct | F1 |
| Id | Content |
|---|---|
| F1 | The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date. |